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Abstract
Simulation of microelectronic processes plays a pivotal role in area of Very Large Scale Integration (VLSI) by providing precise and accurate values of various parameters of a nano-device, before its actual fabrication.
This report focuses on the simulation software, Integrated Systems Engineering-Technology Computer Aided Design (ISE-TCAD, version 8.0). The graphical user interface, GENESISe, of this software has been discussed followed by the process and device simulation tools, which are explained with the help of a 100nm MOSFET. The 100nm MOSFET process was developed using various tools available in this software.
This report also presents some of the simulation activities designed for a VLSI nanotechnology class to help students learn this software quickly and easily. A list of future works has also been proposed, which if implemented, will ensure the usage of this software in the best possible manner.
